SCMOS Layout Rules - Via2


Vias must be drawn orthogonal to the grid of the layout. Non-Manhattan vias are not allowed.

Rule Description Lambda
3 Metal Process 4+ Metal Process
SCMOS SUBM DEEP SCMOS SUBM DEEP
14.1 Exact size 2x2 2x2 n/a 2x2 2x2 3x3
14.2 Minimum spacing 3 3 n/a 3 3 3
14.3 Minimum overlap by metal2 1 1 n/a 1 1 1
14.4 Minimum spacing to via1 for technology codes that do not allow stacked vias (SCNA, SCNE, SCN3M, SCN3ME, SCN3MLC) 2 2 n/a 2 2 n/a
14.5 Via2 may be placed over contact

 


SCMOS Layout Rules - Metal3

Rule Description Lambda
3 Metal Process 4+ Metal Process
SCMOS SUBM DEEP SCMOS SUBM DEEP
15.1 Minimum width 6 5 n/a 3 3 3
15.2 Minimum spacing to metal3 4 3 n/a 3 3 4
15.3 Minimum overlap of via2 2 2 n/a 1 1 1
15.4 Minimum spacing when either metal line is wider than 10 lambda 8 6 n/a 6 6 8