Rule
|
Description
|
Lambda
|
SCMOS
|
SUBM
|
DEEP
|
23.1
|
Minimum POLY_CAP1 width. This is lithographic; the minimum to build a
real capacitor is greater than 12 lambda
|
8
|
n/a
|
n/a
|
23.2
|
Minimum spacing, POLY_CAP1 to POLY_CAP1 (neighboring capacitor)
|
4
|
n/a
|
n/a
|
23.3
|
Minimum spacing, POLY_CAP1 to ACTIVE (all capacitors must be over
field)
|
8
|
n/a
|
n/a
|
23.4
|
Minimum overlap, POLY_CAP1 over POLY
|
3
|
n/a
|
n/a
|
23.5
|
Minimum overlap, POLY_CAP1 over CONTACT
|
2
|
n/a
|
n/a
|
23.6
|
Minimum overlap, POLY over CONTACT (in a capacitor only; still 1
lambda elsewhere)
|
2
|
n/a
|
n/a
|
23.7
|
Minimum spacing, POLY to CONTACT-to-POLY_CAP1
|
2
|
n/a
|
n/a
|
23.8
|
Minimum spacing, unrelated METAL1 to POLY_CAP1
|
4
|
n/a
|
n/a
|
23.9
|
Minimum spacing, METAL2 to POLY_CAP1
|
2
|
n/a
|
n/a
|