SCMOS Layout Rules - Via4
(SUBM and DEEP)


Vias must be drawn orthogonal to the grid of the layout. Non-Manhattan vias are not allowed.

Rule Description Lambda
5 Metal Process 6+ Metal Process
SCMOS SUBM DEEP SCMOS SUBM DEEP
25.1 Exact size n/a 2x2 3x3 n/a 2x2 3x3
25.2 Minimum spacing n/a 3 3 n/a 3 3
25.3 Minimum overlap by Metal4 n/a 1 1 n/a 1 1

 

SCMOS Layout Rules - Metal5
(SUBM and DEEP)


Any designer using the SCMOS rules who wants the TSMC Thick_Top_Metal must draw the top metal to comply with the TSMC rules for that layer.

 
Rule Description Lambda
5 Metal Process 6+ Metal Process
SCMOS SUBM DEEP SCMOS SUBM DEEP
26.1 Minimum width n/a 4 4 n/a 3 3
26.2 Minimum spacing to Metal5 n/a 4 4 n/a 3 4
26.3 Minimum overlap of Via4 n/a 1 2 n/a 1 1
26.4 Minimum spacing when either metal line is wider than 10 lambda n/a 8 8 n/a 6 8