MOSIS SCMOS - Metal1

SCMOS Layout Rules - Metal1

Rule Description Lambda

SCMOS SUBM DEEP

7.1 Minimum width 3 3 3

7.2 Minimum spacing 2 3 3

7.3 Minimum overlap of any contact 1 1 1

7.4 Minimum spacing when either metal line is wider than 10 lambda 4 6 6

Rule	Description	Lambda
Rule	Description	SCMOS	SUBM	DEEP
7.1	Minimum width	3	3	3
7.2	Minimum spacing	2	3	3
7.3	Minimum overlap of any contact	1	1	1
7.4	Minimum spacing when either metal line is wider than 10 lambda	4	6	6