| Rule | Description | Lambda | ||
|---|---|---|---|---|
| SCMOS | SUBM | DEEP | ||
| 3.1 | Minimum width | 2 | 2 | 2 |
| 3.2 | Minimum spacing over field | 2 | 3 | 3 |
| 3.2.a | Minimum spacing over active | 2 | 3 | 4 |
| 3.3 | Minimum gate extension of active | 2 | 2 | 2.5 |
| 3.4 | Minimum active extension of poly | 3 | 3 | 4 |
| 3.5 | Minimum field poly to active | 1 | 1 | 1 |
