SCMOS Layout Rules - High Res


Rule Description Lambda
SCMOS SUBM DEEP
27.1 Minimum HR width 4 4 n/a
27.2 Minimum HR spacing 4 4 n/a
27.3 Minimum spacing, HR to contact
(no contacts allowed inside HR) 		2 2 n/a
27.4 Minimum spacing, HR to external active 2 2 n/a
27.5 Minimum spacing, HR to external poly2 2 2 n/a
27.6 Resistor is poly2 inside HR; poly2 ends stick out for contacts, the entire resistor must be outside well and over field
27.7 Minimum poly2 width in resistor 5 5 n/a
27.8 Minimum spacing of poly2 resistors
(in a single HR region) 		7 7 n/a
27.9 Minimum HR overlap of poly2 2 2 n/a