Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
27.1 | Minimum HR width | 4 | 4 | n/a |
27.2 | Minimum HR spacing | 4 | 4 | n/a |
27.3 |
Minimum spacing, HR to contact
(no contacts allowed inside HR) |
2 | 2 | n/a |
27.4 | Minimum spacing, HR to external active | 2 | 2 | n/a |
27.5 | Minimum spacing, HR to external poly2 | 2 | 2 | n/a |
27.6 | Resistor is poly2 inside HR; poly2 ends stick out for contacts, the entire resistor must be outside well and over field | |||
27.7 | Minimum poly2 width in resistor | 5 | 5 | n/a |
27.8 |
Minimum spacing of poly2 resistors
(in a single HR region) |
7 | 7 | n/a |
27.9 | Minimum HR overlap of poly2 | 2 | 2 | n/a |