MOSIS PARAMETRIC TEST RESULTS RUN: T36S VENDOR: AMI TECHNOLOGY: SCN05 FEATURE SIZE: 0.5 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: American Microsystems, Inc. C5 TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 3.0/0.6 Vth 0.79 -0.93 volts SHORT 20.0/0.6 Idss 450 -243 uA/um Vth 0.68 -0.91 volts Vpt 10.0 -10.0 volts WIDE 20.0/0.6 Ids0 < 2.5 < 2.5 pA/um LARGE 50/50 Vth 0.71 -0.96 volts Vjbkd 11.4 -11.7 volts Ijlk <50.0 <50.0 pA Gamma 0.48 0.59 V^0.5 K' (Uo*Cox/2) 58.3 -18.5 uA/V^2 Low-field Mobility 476.12 151.08 cm^2/V*s COMMENTS: XL_AMI_C5F FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 volts PROCESS PARAMETERS N+ P+ POLY PLY2_HR POLY2 MTL1 MTL2 UNITS Sheet Resistance 81.8 102.0 22.5 988 40.4 0.09 0.09 ohms/sq Contact Resistance 57.5 125.9 15.9 25.6 0.87 ohms Gate Oxide Thickness 141 angstrom PROCESS PARAMETERS MTL3 N\PLY N_W UNITS Sheet Resistance 0.05 820 810 ohms/sq Contact Resistance 0.79 ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ P+ POLY POLY2 M1 M2 M3 N_W UNITS Area (substrate) 424 730 87 32 16 10 40 aF/um^2 Area (N+active) 2450 36 16 11 aF/um^2 Area (P+active) 2360 aF/um^2 Area (poly) 858 57 16 9 aF/um^2 Area (poly2) 52 aF/um^2 Area (metal1) 31 13 aF/um^2 Area (metal2) 32 aF/um^2 Fringe (substrate) 310 251 76 59 39 aF/um Fringe (poly) 61 38 28 aF/um Fringe (metal1) 51 33 aF/um Fringe (metal2) 52 aF/um Overlap (N+active) 201 aF/um Overlap (P+active) 262 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 2.05 volts Vinv 1.5 2.30 volts Vol (100 uA) 2.0 0.13 volts Voh (100 uA) 2.0 4.86 volts Vinv 2.0 2.48 volts Gain 2.0 -19.83 Ring Oscillator Freq. DIV256 (31-stg,5.0V) 94.32 MHz D256_WIDE (31-stg,5.0V) 150.01 MHz Ring Oscillator Power DIV256 (31-stg,5.0V) 0.47 uW/MHz/gate D256_WIDE (31-stg,5.0V) 0.98 uW/MHz/gate COMMENTS: SUBMICRON T36S SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Aug 13/03 * LOT: T36S WAF: 1101 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 1.41E-8 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.6461285 +K1 = 0.9152455 K2 = -0.105898 K3 = 26.1007653 +K3B = -8.3258109 W0 = 1E-8 NLX = 1E-9 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 3.7861788 DVT1 = 0.3717718 DVT2 = -0.0830195 +U0 = 442.2002499 UA = 1E-13 UB = 1.185519E-18 +UC = 6.470959E-12 VSAT = 1.727533E5 A0 = 0.6072333 +AGS = 0.1377586 B0 = 2.667083E-6 B1 = 5E-6 +KETA = -2.897119E-3 A1 = 3.028408E-4 A2 = 0.345619 +RDSW = 1.077249E3 PRWG = 0.1399237 PRWB = 0.0595509 +WR = 1 WINT = 2.208544E-7 LINT = 4.960111E-8 +XL = 1E-7 XW = 0 DWG = -1.893724E-9 +DWB = 5.47692E-8 VOFF = 0 NFACTOR = 0.472999 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 2.181479E-3 ETAB = -6.299339E-4 +DSUB = 0.0689754 PCLM = 2.4881989 PDIBLC1 = 0.9941032 +PDIBLC2 = 2.298113E-3 PDIBLCB = -0.0180618 DROUT = 0.8838803 +PSCBE1 = 6.445443E8 PSCBE2 = 2.598335E-4 PVAG = 0 +DELTA = 0.01 RSH = 81.8 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 2.01E-10 CGSO = 2.01E-10 CGBO = 1E-9 +CJ = 4.227962E-4 PB = 0.9113851 MJ = 0.4296861 +CJSW = 2.925306E-10 PBSW = 0.8 MJSW = 0.170165 +CJSWG = 1.64E-10 PBSWG = 0.8 MJSWG = 0.170165 +CF = 0 PVTH0 = 0.1375778 PRDSW = -174.8924404 +PK2 = -0.0194887 WKETA = -0.0237035 LKETA = 0.0205439 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 1.41E-8 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.9213369 +K1 = 0.5309886 K2 = 0.0157077 K3 = 3.9841467 +K3B = -0.8977975 W0 = 1E-8 NLX = 1E-9 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 2.8313335 DVT1 = 0.4250351 DVT2 = -0.055987 +U0 = 209.2163727 UA = 2.878347E-9 UB = 1.397451E-21 +UC = -6.27575E-11 VSAT = 2E5 A0 = 0.9102666 +AGS = 0.1449591 B0 = 1.211218E-6 B1 = 5E-6 +KETA = -1.616658E-3 A1 = 0 A2 = 0.3 +RDSW = 2.088968E3 PRWG = 2.930817E-4 PRWB = -0.0963307 +WR = 1 WINT = 3.279186E-7 LINT = 6.251424E-8 +XL = 1E-7 XW = 0 DWG = -2.846864E-8 +DWB = 1.437983E-8 VOFF = -0.0130604 NFACTOR = 1.0218439 +CIT = 0 CDSC = 2.4E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.1086822 ETAB = -0.0677706 +DSUB = 0.8682467 PCLM = 2.168708 PDIBLC1 = 0.112826 +PDIBLC2 = 3.525757E-3 PDIBLCB = -0.059791 DROUT = 0.3016682 +PSCBE1 = 5.091678E9 PSCBE2 = 5E-10 PVAG = 0.0256592 +DELTA = 0.01 RSH = 102 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 XPART = 0.5 +CGDO = 2.62E-10 CGSO = 2.62E-10 CGBO = 1E-9 +CJ = 7.247826E-4 PB = 0.9541788 MJ = 0.4958349 +CJSW = 2.613323E-10 PBSW = 0.99 MJSW = 0.2516611 +CJSWG = 6.4E-11 PBSWG = 0.99 MJSWG = 0.2516611 +CF = 0 PVTH0 = 5.98016E-3 PRDSW = 14.8598424 +PK2 = 3.73981E-3 WKETA = 3.391823E-3 LKETA = -8.97011E-3 ) *